TES | Single-cavity ECR-plasma based sources

TES | Single-cavity ECR-plasma based sources TES is a family of ion sources, electron sources, plasma sources, and atom sources, based on patented mono-cavity ECR technology.Starting from the same core element a wide variety of sources can be built, ranging from a...

TES | Single-cavity ECR-plasma based sources

TES | Single-cavity ECR-plasma based sources TES is a family of ion sources, electron sources, plasma sources, and atom sources, based on patented mono-cavity ECR technology.Starting from the same core element a wide variety of sources can be built, ranging from a...

Ultracompact ultralow power ECR technology

Ultracompact ultralow power ECR technology At the core of all Polygon Physics products is a patented microwave discharge system that can ignite and maintain an electron cyclotron resonance (ECR) plasma at very low power consumption (~ 1W). This means we can use simple...

Multi Beam Sputtering (MBS)

Multi Beam Sputtering (MBS) Multi Beam Sputtering (MBS) is a Physical Vapor Deposition (PVD) method that relies on the use of multiple independent ion sources. Multi Beam Sputtering is unique in that it enables thin film deposition of multi component materials,...