Ultracompact ultralow power ECR technology

At the core of all Polygon Physics products is a patented microwave discharge system that can ignite and maintain an electron cyclotron resonance (ECR) plasma at very low power consumption (~ 1W). This means we can use simple low power transmitters similar to those...

Multi Beam Sputtering (MBS)

Multi Beam Sputtering (MBS) is a Physical Vapor Deposition (PVD) method that relies on the use of multiple independent ion sources. Multi Beam Sputtering is unique in that it enables thin film deposition of multi component materials, uniform in thickness and...