Photo of multipurpose ECR source TES mounted on its CF40 flange, with its connectors (gas, high voltage (2x), and RF power)

ECR ion sources

Ion sources based on ECR technology for stable and reliable ion beams of a few tens of volts up to 30kV, operated by plug&play USB software. Its filamentless concept enables different source gases and guarantees a long source lifetime.

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Custom beam solutions

Linear beams, circular beams, arrays of beams, small or large. Our unique ECR technology allows us to design ion beams of any size and shape. Whether you need a 1 millimeter beam or a 1×1 meter beam, we look forward to creating your beam of choice.

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Close-up of a 20-source circular array of a multi beam sputter deposition system

Surface treatment systems

Always based on our own ECR technology, Polygon Physics designs and fabricates complete vacuum systems for surface treatments, ranging from small R&D setups to fully automated large scale industrial systems. Possible surface processes are e.g. (multi) ion beam sputter deposition, sputter cleaning, nanostructuring, ion implantation, …

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A new tool for combinatorial sputtering: visit us at SVTM2018

Learn more about our brand new ion beam deposition system with unique possibilities for combinatorial materials research! We are ready for you at the SVTM2018 in Bordeaux, France at booth 24, or come listen to our talk on Wednesday June 13 at 15h at the associated... read more

A truly bipolar ion source

How convenient to be able to switch from a positive ion source to a negative ion source, without changing any hardware! Recent results with our multipurpose ECR source TES in ion mode demonstrated its bipolar capability. Upon changing the polarity of the power supply... read more

Product launch at ECASIA’17: ECR source TES

Monday September 25 through Wednesday September 27 Polygon Physics will participate in the industrial exhibition of ECASIA’17 in Montpellier, France. We will have our multipurpose ECR source TES-35 on display for the very first time. Come check it out at booth... read more
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Compact ECR plasmas

Our unique ultracompact and ultralow power ECR technology allows us to construct ion and electron beams of any size and shape.

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Custom ion beam design

It is our pride and joy to deliver the ion beam you need: small or large, circular or rectangular, our design team is at your disposal.

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Industrial project management

With experience in both industry and academia the Polygon Physics team knows what is involved in bringing a project to full fruition.