ECR ion sources

Ion sources based on ECR technology for stable and reliable ion beams of a few hundreds of volts up to 30kV, operated by plug&play USB software. Its filamentless concept enables different source gases and guarantees a long source lifetime.

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Custom beam solutions

Linear beams, circular beams, arrays of beams, small or large. Our unique ECR technology allows us to design ion beams of any size and shape. Whether you need a 1 millimeter beam or a 1×1 meter beam, we look forward to creating your beam of choice.

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Surface treatment systems

Always based on our own ECR technology, Polygon Physics designs and fabricates complete vacuum systems for surface treatments, ranging from small R&D setups to fully automated large scale industrial systems. Possible surface processes are e.g. (multi) ion beam sputter deposition, sputter cleaning, nanostructuring, ion implantation, …

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Our spring/summer tour schedule

Polygon Physics will be represented at the E-MRS Spring 2017 meeting. Find us May 23 – 25 in the Convention Center of Strasbourg at booth 59. In June we will participate in the SVTM 2017, which will be held in Nice, in the Acropolis Congress Center. We hope to see... read more

New source testimonial: “uniquely clean and flexible”

Stuart Reid, research team leader at the Institute of Thin Films, Sensors and Imaging in the School of Engineering and Computing at the University of the West of Scotland: “It has been fantastic to work with Pascal and the wider team at Polygon Physics. These... read more

Kick-off Eurostars project COMBIMAT

The kick-off meeting of the Eurostars project COMBIMAT took place on October 5, 2016. COMBIMAT is a collaborative project that will commercialize a tool for material discovery via deposition of combinatorial material libraries. The system will combine a versatile... read more

Compact ECR plasmas

Our unique ultracompact and ultralow power ECR technology allows us to construct ion and electron beams of any size and shape.

Custom ion beam design

It is our pride and joy to deliver the ion beam you need: small or large, circular or rectangular, our design team is at your disposal.

Industrial project management

With experience in both industry and academia the Polygon Physics team knows what is involved in bringing a project to full fruition.